SAN JOSE, Calif. – Applied Materials Inc. on Tuesday (Aug. 24) is expected to roll out a new product-a shallow trench isolation film deposition tool, according to an analyst. Applied (Santa Clara, ...
In this paper, a 5nm FinFET flow was built using the SEMulator3D virtual fabrication platform. Different STI (shallow trench isolation) recess profiles were investigated using the pattern-dependent ...
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